Semiconductor manufacturing handbook [electronic resource] / Hwaiyu Geng, editor in chief.
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- ISBN: 0071468153
- ISBN: 9780071445597
- Physical Description: 1 electronic text : ill.
- Publisher: New York : McGraw-Hill, 
|General Note:|| Print version c2005.
|Bibliography, etc. Note:|| Includes bibliographical references and index.
|Formatted Contents Note:|| http://www.loc.gov/catdir/enhancements/fy0624/2005045580-t.html
Pt. 1. Semiconductor fundamentals and basic materials -- pt. 2. Wafer processing -- pt. 3. Final manufacturing -- pt. 4. Nanotechnology, EMS, and FPD -- pt. 5. Gases and chemicals -- pt. 6. Fab yield, operations, and facilities.
|Additional Physical Form available Note:|| Also issued in print and PDF version.
|Biographical or Historical Data:|| Contributor biographical information: http://www.loc.gov/catdir/enhancements/fy0624/2005045580-b.html
|Source of Description Note:|| Description based on cover image and table of contents, viewed on May 4, 2007.