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Semiconductor manufacturing handbook [electronic resource] / Hwaiyu Geng, editor in chief.

Geng, Hwaiyu. (Added Author). Zhou, Lin. (Added Author). Park, Ilsun. (Added Author). Ravi, K. V. (Added Author). Rathore, Hazara S. (Added Author). Chanda, Kaushik. (Added Author). Ren, L. P. (Added Author). Tu, King N. (Added Author). Coumou, David J. (Added Author). Biltoft, Peter. (Added Author). Howard, Charles. (Added Author). Mack, Chris A. (Added Author). Graf, Michael. (Added Author). Zhang, Peng. (Added Author). Lai, Shouliang. (Added Author). Solzbacher, Florian. (Added Author). McInerney, Edward J. (Added Author). Ramdani, Jamal. (Added Author). Vaccari, Giovanni. (Added Author). Ritzdorf, Tom. (Added Author). Klocke, John. (Added Author). Dyer, Timothy S. (Added Author). Machamer, Andrew. (Added Author). Blair, Donald W. (Added Author). Arai, Kazuhisa. (Added Author). Kobayashi, Yoshikazu. (Added Author). Otani, Hideaki. (Added Author). T�onnies, Dietrich. (Added Author). T�opper, Michael. (Added Author). Wang, Zhong L. (Added Author). Huff, Michael A. (Added Author). Liu, David N. (Added Author). Curcie, Wayne D. (Added Author). Sweeney, Joseph D. (Added Author). Cox, James C. (Added Author). Cavicchi, Kristin. (Added Author). Barsness, Dan. (Added Author). Gould, Charles K. (Added Author). Albrecht, David J. (Added Author). Li, Bo. (Added Author). Carriker, Wayne. (Added Author). Haris, Clint. (Added Author). Peltinov, Ram. (Added Author). Menaker, Mina. (Added Author). Scibilia, Bruno. (Added Author). Altis, Yoan Dupret. (Added Author). McCafferty, Robert H. (Added Author). Davis, Brett J. (Added Author). Trammell, Steven R. (Added Author). Pavlotsky, Richard V. (Added Author). Beck, Stephen C. (Added Author). Gendreau, Michael. (Added Author). Amick, Hal. (Added Author). Levit, Larry. (Added Author). Muller, Chris. (Added Author). Kochevar, Steven. (Added Author). Gromala, Jerry. (Added Author). Pinkowski, Richard E. (Added Author). IDC Corporation. (Added Author).
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Electronic resources

Subject: Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Semiconductors > Materials.
Integrated circuits > Reliability.
Plasma engineering.
Process control.
Vacuum techology.
Integrated circuits > Masks.
Ion implantation.
Rapid thermal process.
Plasma etching.
Physical vapor deposition.
Chemical vapor deposition.
Electrolytic polishing.
Semiconductors > Polishing.
Semiconductors > Cleaning.
Grinding and polishing.
Microelectronic packaging.
Electronic packaging.
Microelectromechanical systems.
Flat panel displays.
Waste gases > Purification.
Hydraulic conveying.
Slurry pipelines.
Chemical plants > Waste disposal.
Water-supply engineering.
Materials handling.
Six sigma (Quality control standard)
Semiconductor industry > Environmental aspects.
Semiconductor industry > Health aspects.
Semiconductor industry > Safety measures.
Clean rooms > Design and construction.
Noise control.
Static eliminators.
Airborne infection.
Air > Pollution.
Sewage > Purification > Neutralization.
Genre: Electronic books.
Internet resources.

Record details

  • ISBN: 0071468153
  • ISBN: 9780071445597
  • Physical Description: 1 electronic text : ill.
  • Publisher: New York : McGraw-Hill, [2005]

Content descriptions

General Note: Print version c2005.
Bibliography, etc. Note: Includes bibliographical references and index.
Formatted Contents Note:
Pt. 1. Semiconductor fundamentals and basic materials -- pt. 2. Wafer processing -- pt. 3. Final manufacturing -- pt. 4. Nanotechnology, EMS, and FPD -- pt. 5. Gases and chemicals -- pt. 6. Fab yield, operations, and facilities.
Additional Physical Form available Note: Also issued in print and PDF version.
Biographical or Historical Data: Contributor biographical information:
Source of Description Note: Description based on cover image and table of contents, viewed on May 4, 2007.
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