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Microchip fabrication : a practical guide to semiconductor processing [electronic resource] / Peter Van Zant.

Van Zant, Peter. (Author).
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Electronic resources

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Subject: Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Semiconductor industry.
Semiconductors > Materials.
Chemicals.
Crystal growth.
Semiconductor wafers.
Semiconductors > Defects.
Contamination (Technology)
Industrial productivity.
Oxidation.
Microelectronics.
Microlithography.
Photolithography.
Semiconductor doping.
Semiconductor films.
Thin films.
Surfaces (Technology)
Metallizing.
Semiconductor waters > Design and construction.
Electronic packaging.
Genre: Electronic books.
Internet resources.

Record details

  • ISBN: 0071450211
  • ISBN: 9780071432412
  • Physical Description: 1 electronic text (xiii, 642 p.) : ill.
  • Edition: 5th ed.
  • Publisher: New York : McGraw-Hill, [2004]

Content descriptions

General Note: Print version c2004.
Bibliography, etc. Note: Includes bibliographical references and index.
Formatted Contents Note: http://www.loc.gov/catdir/toc/mh051/2004040287.html
Additional Physical Form available Note: Also issued in print and PDF version.
Biographical or Historical Data: Contributor biographical information: http://www.loc.gov/catdir/bios/mh051/2004040287.html
Source of Description Note: Description based on cover image and table of contents, viewed on April 25, 2007.

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