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Lithography [electronic resource] : main techniques / edited by Stefan Landis.

Landis, Stefan. (Added Author). ebrary, Inc. (Added Author).
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Electronic resources

Subject: Microlithography.

Record details

  • Physical Description: xxv, 377 p. : ill. (some col.)
  • Publisher: London : ISTE ; 2011.

Content descriptions

General Note: Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.
Bibliography, etc. Note: Includes bibliographical references and index.
Summary: "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher.
Reproduction Note: Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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