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Lithography / edited by Stefan Landis.

Landis, Stefan. (Added Author).
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Electronic resources

Subject: Microlithography.
Genre: Electronic books.

Record details

  • ISBN: 9781118557662
  • ISBN: 1118557662
  • ISBN: 9781118621233
  • ISBN: 1118621239
  • Physical Description: 1 online resource (405 pages).
  • Publisher: London : Wiley, 2013.

Content descriptions

General Note: 3.7.2. Thermal effect.
Summary: Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Source of Description Note: Print version record.
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